|
|
|
|
|
|
|
|
|
Pixel pitch
Designated resolution at RIP |
|
|
|
| Designate at job registration |
|
|
|
|
|
|
Board size: 534 x 610mm
When DFR sensitivity of 13mJ/cm² is used. |
|
| Job-switching for exposure |
|
|
|
|
|
|
|
|
|
| Total alignment accuracy in case that the ideal board is to be processed. |
|
|
|
| ø0.20 to 3.20mm (Through hole) |
|
| Special illumination system (option) can be installed for via marks. |
|
|
|
| Real-time alignment by using two or four marks |
|
|
|
|
|
| Each board is exposed with the most suitable automatic magnification calculation. |
|
|
|
|
| Magnification of the first N boards in a lot is measured and the following boards are exposed with the magnification value based on these measurement results. |
|
| XY independent scaling Designate the number of measuring boards (N pieces) at job registration. |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
| 334 x 334mm to 534 x 620mm |
|
| Minimum size down to 248 x 248mm can be processed by semi-automatic processing. |
|
|
|
0.04  3.0mm |
|
| Maximum thickness up to 5.0mm can be processed by semi-automatic processing. |
|
|
|
Mechanical clamp
Wide range autofocus function
Alignment retry function |
|
|
